工程實蹟
工程實蹟
Relocation & Move out for 300mm Service |
- ● DNS Wet Station FC3100、Wafer scrubber SS3000
- ● SEMESWafer scrubber SWP3004
- ● TELWet Station UW300Z & Expedius
Retrofit, Relocation & Hook-up Service |
● A.O.C Quartz Tube Clean、Mask clean
● DNS SPW、HFVAP、Scrubber 、Wet Station 200 mm
SPW、HFVAP、Scrubber SS-3000-AR、Wet Station FS820L Bitmap
● Nanotech Tube Clean
● SEMITOOL Carrier Washers Bitmap
- Storm II cassette & box washer
- ● SEMES Wafer Scrubber Wafer scrubber SWP3004
- ● S.E.S Wet Station Wet Station 200
- ● SEZ Single Wafer Spin Processor
Single Wafer Spin Processor 201 & 203
● SINGULUS Wet Station
● SUMITOMO Carrier Washers
- ● TEL Scrubber Wet Station 200 mm 、Wet Station 300 mm
Scrubber SS-4CS、Wet Station UW300Z & Expedius
- ● Etch, Aligner, UV Cleaner
- ● Developer, Mask Cleaner. Developer
Horizontal Handing, Coater